Introduction to Vacuum Technology
Dublin Core
Title
Introduction to Vacuum Technology
Subject
Technology
Description
Vacuum systems are critical to many industries. They are vital to establishing required process pressures, establishing a clean process environment, and removing reaction by-products from the process chamber. This text, a revision and expansion of David Hata’s Introduction to Vacuum Technology published in 2008, addresses basic topics in vacuum technology for individuals tasked with maintaining vacuum systems and instructors teaching technician-level courses. The topics are carefully curated to the needs of technicians in a production environment and the types of vacuum systems used, and the accompanying laboratory manual and instructor’s guide support the delivery of lecture-laboratory courses.
Creator
David M. Hata
Source
https://knightscholar.geneseo.edu/cgi/viewcontent.cgi?article=1033&context=oer-ost
Publisher
Milne Open Textbooks
Date
2023
Contributor
Baihaqi
Rights
Creative Commons
Format
PDF
Language
English
Type
Textbooks
Files
Collection
Citation
David M. Hata, “Introduction to Vacuum Technology,” Open Educational Resource (OER) - USK Library, accessed January 31, 2026, http://oer.usk.ac.id/items/show/7672.