Introduction to Vacuum Technology

Introduction to Vacuum Technology

Technology

Vacuum systems are critical to many industries. They are vital to establishing required process pressures, establishing a clean process environment, and removing reaction by-products from the process chamber. This text, a revision and expansion of David Hata’s Introduction to Vacuum Technology published in 2008, addresses basic topics in vacuum technology for individuals tasked with maintaining vacuum systems and instructors teaching technician-level courses. The topics are carefully curated to the needs of technicians in a production environment and the types of vacuum systems used, and the accompanying laboratory manual and instructor’s guide support the delivery of lecture-laboratory courses.

David M. Hata

https://knightscholar.geneseo.edu/cgi/viewcontent.cgi?article=1033&context=oer-ost

Milne Open Textbooks

2023

Baihaqi

Creative Commons

PDF

English

Textbooks